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Blog posts tagged with 'cmp'

Slurry & Chemical Flow Controller Retrofit Kits for CMP tools
Slurry & Chemical Flow Controller Retrofit Kits for CMP tools
Malema Sensors® LFC-7000 series slurry flow controllers improve flow control performance and time to achieve flow control, saving our customers 20% to 30% of CMP slurry compared to peristaltic pump slurry delivery.
Preventing Cross Contamination with MIID
Preventing Cross Contamination with MIID

CMP Slurry and DI Water cross contamination events were disrupting operations and depressing yields at a major, multi-national semiconductor manufacturer. On a reoccurring but sporadic basis, the customer discovered CMP slurry contaminating its DI water systems or their CMP slurries supplies were in...