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Ultrasonic Flow Controllers
Malema's Ultrasonic flow controllers combine a state-of-the-art Malema ultrasonic flow meter with advanced digital signal processing (DSP), with a control valve, providing the industry standard in accuracy, repeatability, and control time for critical semiconductor processing applications including CMP and cleaning.
LFC-7000 Ultrasonic Liquid Flow Controllers
The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.
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LFC-7650 Ultrasonic Liquid Flow Controllers
The LFC-7650 Series high-performance closed-loop flow controllers for CMP polishing slurries are designed as a drop-in upgrade to improve performance of existing semiconductor manufacturing polishing tools.
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